| Type |  Book |
| ชื่อเรื่อง | Fundamentals of microfabrication and nanotechnology / Marc J. Madou |
| ผู้แต่ง | Madou, Marc j |
| ISBN | 142005516X |
| | 1420055119 |
| | 1420055119 (hbk. : v. 1) |
| | 1420055194 |
| | 9781420055115 (hbk. : v. 1) |
| | 9781420055115 (v.1) |
| | 9781420055160 (v.3) |
| | 9781420055191 (v.2) |
| | 142005516X (hbk. : v.3) |
| | 142005516X (v. 3) |
| | 0849331803 (set) |
| | 1420055119 (v. 1) |
| | 1420055194 (hbk. : v.2) |
| | 1420055194 (v. 2) |
| | 9780849331800 (set) |
| | 9781420055115 (v. 1) |
| | 9781420055160 (hbk. : v.3) |
| | 9781420055160 (v. 3) |
| | 9781420055191 (hbk. : v.2) |
| | 9781420055191 (v. 2) |
| พิมพลักษณ์ | Boca Raton, Fla. : CRC, c2012 |
| ครั้งที่พิมพ์ | 3rd ed |
| รูปเล่ม | 3 v. : ill. (some col.) |
| ลิงค์ | Contents. [ v.1 ] |
| | Contents. [ v.2 ] |
| | Contents. [ v.3 ] |
| หัวเรื่อง | BioMEMS |
| | INTEGRATED CIRCUITS --DESIGN AND CONSTRUCTION [] |
| | LASERS --INDUSTRIAL APPLICATIONS [] |
| | MACHINING |
| | Microelectromechanical systems |
| | Microelectromechanical systems --Design and construction [] |
| | MICROELECTRONIC PACKAGING |
| | MICROELECTRONICS |
| | Microfabrication |
| | Microfluidics |
| | Nanoelectromechanical systems |
| | NANOSTRUCTURED MATERIALS --DESIGN AND CONSTRUCTION [] |
| | Solid state physics |